characteristics of ultrasonic acoustic system

 

 

ZHANG Yun dian, FENG Gang

 

(College of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China)

 

 

Abstract: Aiming at the problems of the effects of capillary overhang length on acoustic resonance frequency and capillary tip amplitude,the integral equation of transducer and amplitude transformer was pulled, and the finite element model of ultrasonic wire bonding acoustic system was built.The finite element modal analysis was investigated.The figure of system vibration mode,resonance frequency and capillary tip amplitude relative to different relative offset were obtained. Thus scatter charts of relative offset with resonance frequency of acoustic system and relative offset with capillary tip amplitude were gotten through changing the capillary relative offset. At the same time the function relationship was set up.The finite element analysis results were evaluated on the Agilent impedance analyzer,the vibration parameters were tested.The results indicate that the simulation results are in agreement with the test results.Through changing the capillary overhang length,the resonant frequency and the tip amplitude of acoustic system can be changed.When the capillary overhang length is about 2mm,the amplitude reaches the maximum.And the capillary overhang length has little effects on vibration mode of the system. Besides the adjacent modes are far away from the main mode which can effectively avoid aliasing.

 

Key words: finite element; ultrasonic wire bonding; capillary; vibration characteristics