Design method of armature of novel electromagnetic micro relay
                                           ZHU Jiawei, LIU Runzhou, LI Dike, XIE Xun, NI Xu, LI Haiwang
                                 (School of Energy and Power Engineering, Beihang University, Beijing 100191, China)

Abstract: Aiming at the problems on designing armature of threedimensionalcoil electromagnetic micro relays, a novel electromagnetic micro relay with threedimensional coil was designed based on MEMS technology. Influence of the micro relay armature elasticity on the overall performance of the electromagnetic micro relay, such as response time and overtravel, was analyzed. Structural design methods for the armature of this kind of electromagnetic micro relays based on finite element simulation were carefully studied. Relationships were studied between the elasticity of the armature and some commonlyused parameters. At last basic methods and criteria for designing the armature were given. The results indicate that the overall performance of the electromagnetic micro relay has a positive correlation with the armatures elasticity, and that the elasticity depends significantly on the design parameters of the silicon spring.

Key words: microelectromechanical system（MEMS）; electromagnet micro relay; threedimensional coil; armature; structural design