Static performance test of line structured light sensors
                                                         LI Yukun, SHI Zhaoyao, YU Bo, WANG Tao, LI Xuezhe
(Beijing Engineering Research Center of Precision Measurement Technology and Instruments，Beijing University of Technology, Beijing 100124，China)

Abstract: Aiming at the influence of various static performance parameters of line structured light sensors on its measurement accuracy, a plan of line structured light sensors static performance test scheme was designed. A second level gauge block, nanopositioning table and laser interferometer were used on highprecision mobile platform. The important static performance parameters ，such as stability, repeatability and linearity, were analyzed to quantify the influence of various static performance parameters on the measurement accuracy of the sensor. The working surface of the second level gauge block was used as the measurement surface during the test. The highprecision mobile platform was used to test the whole measurement area of the sensor. The laser interferometer was used to compensate the positioning error of the mobile platform, which improved the reliability of the measurement result. The research results indicate that the sensor needs 1 hour to ensure the measurement accuracy, and the repeatability of the middle measurement area is the best with an average value of 0.418 μm. The linearity of the sensor has the greatest influence on the measurement accuracy. The error caused by the sensor nonlinearity is at most 11.2 μm.

Key words: line structured light sensors; static performance; stability; repeatability; linearity