Twodimensional numerical control system of stage for image measuring microscope
                                                                    SU Jin1,2，XIA Haojie3,AO Yinhui1
(1.College of Electromechanical Engineering,Guangdong University of Technology,Guangzhou 510006,China;2.Research Institute of Hefei University of Technology in Sanshui，Foshan 528100，China; 3.College of Instrument Science and Opto Electronic Engineering，Heifei University of Technology，Hefei 230009，China)

Abstract: Aiming at the problem of scanning the largeformat image stitched by digital microscope, a twodimensional numerical control mechanical structure and control system of stage was designed. The twodimensional stacked coplanar structure was used to reduce the Abbe error, which improved system integration. Finite element analysis on the mechanical structure was conducted. Controlled by MCU, a closedloop displacement control system of the twodimensional numerical control stage based on the combination of grating scale feedback with highprecision and PID precision motion control was designed, which could achieve motion control of the twodimensional movable stage in the directions of both X and Y. The dualfrequency laser interferometer was used to calibrate the designed numerical control twodimensional stage，and the online compensation model of motion control error was established. Therefore, motion precision of the system improved. The results indicate that deformation of the structure is 0.229 5 μm under the load of 10 kg, after compensation, repetitive positioning accuracy is less than ±5 μm in the travel range of 100 mm×100 mm.

Key words: microscope；twodimensional platform；motion control；error compensation