Automatic sampling and compensation of error in time grating angle measuring system

ZHANG Tian-heng1,2, WANG Yang-yang1,2, WU Liang1,2, ZHENG Yong1,2
（1.Engineering Research Center of Mechanical Testing Technology and Equipment, Ministry of Education,
Chongqing University of Technology, Chongqing 400054, China; 2.Chongqing Key Laboratory of
TimeGrating Sensing and Advanced Testing Technology, Chongqing
University of Technology, Chongqing 400054, China）

Abstract: Aiming at the limitation of the movement and installation of the calibrator and the assembly environment, it was difficult to use grating as the precision reference instrument for dense error sampling to achieve high precision measurement. Through the displacement calculation of the time grating angle measuring system and the analysis of the structure of the magnetic field II time grating sensor, the frequency spectrum research was carried out by using the sparse sampling error data, and the compensation model of the angle measuring system was obtained. An automatic sparse sampling and compensation method of time grating angle measurement system error based on laser interferometer was designed. 17 compensation parameters in the compensation model were solved by quantum particle swarm optimization algorithm, and the compensation model was used to compensate the error of angle measurement system. The results indicate that under the condition of sparse sampling, it can quickly and accurately realize automatic error compensation of time grating angle measurement system, and the accuracy of time grating angle measurement system can reach 2.88 ″.

Key words: time-grating angle measuring system; sparse sampling; compensation model; quantum particle swarm optimization