Review of active microvibration isolation system

YI Si-cheng1,2,3, WANG Jin-hai3, LIU Zhi-gang3, ZHANG Quan1, YANG Bin-tang2, MENG Guang2
(1.School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, China;
2.State Key Laboratory of Mechanical System and Vibration, Shanghai Jiao Tong University,
Shanghai 200240, China; 3.Shanghai Aerospace Control Technology Institute, Shanghai 201109, China)

Abstract: In order to reduce the impact of external microvibration interference on precision device and improve the operation accuracy of precision device, the active microvibration isolation system was developed, and the active vibration control technology was utilized in the vibration isolation system. The definition of microvibration was clarified. The criterion of permitted vibration source speed for precision instruments was explained. Based on the theory of vibration isolation, the structural characteristics of single-degree-of-freedom and multi-degree-of-freedom microvibration isolation systems were summarized. On this basis, the actuators in the active vibration isolation system were summarized. Accounting for the dynamics and actuator characteristics of the system, the modeling methods of the structure and the actuator were discussed. The active vibration control methods, including feedback, feedforward, hybrid and the advanced, were evaluated based on the indexes of vibration isolation ratio and stability. Through the analysis of actuator-sensor integration, vibration energy harvest, and intelligent control technology, the future development trend of active microvibration isolation system was predicted. Previous studies results show that comparing with passive vibration isolation, active vibration isolation technology is better in terms of flexibility and efficiency. Particularly, novel microvibration isolation systems based on smart materials (such as piezoelectric and magneto strictive) are widely used. The hysteresis modeling and compensation control methods of the smart material-based microvibration isolation system are extensively studied in this field.
Key words: micro vibration; active control; smart material; actuator; system modeling; hysteresis