半导体设备通讯标准GEM的应用

作者：王戟，王兵 日期：2008-08-14/span> 浏览：4929 查看PDF文档

半导体设备通讯标准GEM的应用

王戟，王兵
（浙江工业大学 信息学院，浙江 杭州 310032）

摘要：SECS/GEM标准用来统一各个生产设备之间以及生产设备和控制设备之间的通讯。介绍了SECS/GEM标准的构成，提出了使用SECS/GEM标准接口解决半导体设备自动化的问题。详细叙述了GEM的通信状态模型、控制状态模型和设备处理状态模型，以及GEM的程序设计。并给出了GEM中事件数据收集的设计的实例。实践表明，SECS/GEM标准设计严谨，适应面宽，在我国半导体芯片工业中应用前景广阔。
关键词：半导体设备；半导体设备通讯标准；通用设备模型；自动化
中图分类号：TP29文献标识码：A文章编号：1001-4551(2008)07-0034-03

Application of GEM in semiconductor equipment
WANG Ji, WANG Bing
(College of Information, Zhejiang University of Technology, Hangzhou 310032, China)
Abstract: SECS/GEM standard was developed to standlize the communication between equipment and controller. The structure of SECS/GEM standard was introduced. A solution based on SECS/GEM standard interface for semiconductor equipment automation was presented. The communication state model, control state model and equipment processing state model of GEM were introduced. The design of GEM was presented, and an example of event data collection design based on GEM was provided. The practice shows that SECS/GEM standard with perfect design has a wide application prospect in homelands semiconductor chip industry.
Key words: semiconductor equipment; semiconductor equipment communication standard(SECS); generic equipment model(GEM)； automation