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微结构器件宏模型的建模方法

作者：章绍东，林谢昭日期：2007-03-05/span> 浏览：4246 查看PDF文档

微结构器件宏模型的建模方法

章绍东¹，林谢昭²

（1．温州职业技术学院电气电子工程系,浙江温州325035；2．浙江大学机械与能源工程学院，浙江杭州 310027)

摘要：能否成功地将计算机辅助设计引入到MEMS设计领域，是MEMS产品市场化的关键。在MEMS系统级模拟中，MEMS器件宏模型的建模方法做为一种在足够精度要求与适时仿真所必要的数值计算效率之间的一种平衡，得到广泛关注。主要描述了微机械器件宏模型的构建问题。以微悬臂梁为例子，阐述了等效电路法、节点分析法、S－空间矩匹配方法、模态－Galerkin方法构建微机械宏模型的研究概况以及各个宏建模方法的优缺点。

关键词：宏模型等效电路节点分析法矩匹配 Galerkin方法

中图分类号：TH16 文献标识码：A 文章编号：

Compact modelling methods for micro-structure device

ZHANG Shao-dong¹, LIN Xie-zhao²

(1. Wenzhou Vocational and Technical College ZheJian WenZhou 325035;

2. College of Mechanical and Energy Engineering, Zhejiang University, Hangzhou 310027)

Abstract：The commercialization success of the MEMS depends on simulating and optimizing the MEMS devices effetely before costly and time-consuming prototyping. The compact modeling of microdevices is one of key issues for MEMS system-level simulation. And the method of modelorder reductionformicrodevices is gaining attention as a way to balance the need for enough fidelity in the model against the numerical efficiency necessary to make the model of practical use in MEMS design. The cantilever microbeam is chosen as an example of illuminating how to extract the compact model. These macro-modelling methods include equivalent circuit representation, nodal design (NODAS), moment-matching procedure in the s-space and mode-Galerkin’s procedure. The major contributions and the advantages and disadvantages of each approach are summarized and discussed.

Keyword: macro-model, equivalent circuit representation, nodal design (NODAS), moment-matching procedure mode-Galerkin’s procedure

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