Study on flow etching method without mask

XIE Haibo, DU Hongyang
(The State Key Lab of Fluid Power Transmission and Control, Zhejiang University, Hangzhou 310027, China)

Abstract: To pattern micro structures with high aspect ratio on glass substrate, a micro fabrication method based on the laminar characteristics of microscale flow was introduced. Experiments on the flow parameters effects on aspect ratios, side wall profile and etching rates were carried out based on the glass substrate. The experimental results reveal that the topography of micro structures patterned with restricted flow etching method is mainly determined by the flowrate of the separant and etchant. The method depicted in this research indicate that restricted flowing etching method can be used to pattern complex micro structures with high aspect ratio, and the topography is mainly depended on the flowrate of the stream and the shape and molecule diffusion of the interface. The conclusions are quite helpful for the research on micorscale laminar flow, and provide useful reference for the microfabricaiotn on isotropy materials.
Key words: microfluidics; microfabrication; laminar flow