2D microangle sensor based on laser autocollimation

LIAN Mengdong, JIN Weifeng, JU Bingfeng
(The State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou 310027, China)

Abstract: In order to solve the problems of measuring surface microprofile and online measurement of precision platform, a compact twodimensional microangle sensor was designed. The sensor based on the principle of laser autocollimation, was consisted of a laser diode as a light source and a quadrant photodiode as a positionsensing device. The sensitivity of the angle sensor does not rely on the focal length of the objective lens, which makes it probable to realize the compact volume. The quadrant photodiode has twodimensional positiondetecting capability, therefore, the angle sensor can detect twoaxis tilt simultaneously. The microangle sensor has a dimension of 25×20×13 mm3. The detection range is ±1 200 arcsec and the resolution is 0.1 arcsec. Comparison experiments with an autocollimator were carried out, which testified the validity of the new compact 2D microangle sensor.
Key words: microangle sensor; laser autocollimation; measurement; twodimensional