Research of dovetail grooves use in O ring sealing of vacuum cavum

ZHU Haike1,2, GAN Zhiyin1,2, LIU Yufeng1,2
（1. Department of Mechanical Manufacturing and Automation, Huazhong University of Science and Technology,
Wuhan 430074, China; 2. Guangdong Realfaith Semiconductor Equipment Co., Ltd., Foshan 528251, China）

Abstract: In order to solve the problem of how to use dovetail groove in O ring sealing in the vacuum cavum, the usage of dovetail groove in manufacture of  metal organic chemical vapor deposition（MOCVD） was first introduced. After the rules of O ring sealings invalidation were given, the models of different O rings and corresponding dovetail grooves were established and analyzed by using ANSYS commercial software. The conclusions were given which will be valuable for engineering application. The research result shows that in O ring sealing, when dovetail groove is used, and the compressing ratio of O ring is about 20%, the sealing performance is eligible.
Key words: O ring sealing; dovetail groove; finite element; stretching ratio; compressing ratio