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International Standard Serial Number:
ISSN 1001-4551
Sponsor:
Zhejiang University;
Zhejiang Machinery and Electrical Group
Edited by:
Editorial of Journal of Mechanical & Electrical Engineering
Chief Editor:
ZHAO Qun
Vice Chief Editor:
TANG ren-zhong,
LUO Xiang-yang
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Impact on fluid flow state by different structural parameters of immersion lithography unit
ZHAO Jinyu, CHEN Hui, FU Xin
(State Key Laboratory of Fluid Power Transmission and Control, Zhejiang University, Hangzhou 310027, China)
Abstract: The different structures of immersion unit should affect the flow state of gap flow field. In order to study the influences on the flow state, the computational fluid dynamics(CFD) simulations with different structures of the immersion unit were established. The analysis of different injection shapes and the height of the gap flow was carried out. The research results show that the injection angle with 90°~150° and the gap height with 0.7 mm~1 mm are the optimize structural parameters.
Key words: immersion iithography; immersion unit; gap flow field; flow simulation; computational fluid dynamics(CFD)
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