Semiactive control method of top lap′s vibration  inhibition in double sided polishing machine

XV Huixin， ZHAO Wenhong， CHEN Chen， ZHOU Fenfen， CHENG Chengyuan
（College of Mechanical Engineering，Zhejiang University of Technology，Hangzhou 310032, China）

Abstract： Vibration is one of the main factors of influencing the processing quality in ultraprecision machining The top lap′s vibration in the double sided polishing machine which used springweighted equipment during the process of polishing declines the processing quality seriously In order to solve this problem， a method of semiactive control in the top lap′s vibration was investigated In detail，  a magneto rheological damper was added into the springweighted equipment, and the damping of magneto rheological damper was controlled at real time In this way， vibration could be inhibited Firstly， the mathematical model of the pressure loading system was established At the mathematical model， the top lap′s motion equation during the process of polishing could be gotten Next， the control strategy of the semiactive control was presented At the control strategy， the control algorithm was given In the end， the simulation of the system under semiactive control was evaluated in Simulink The other results were compared with the other results under uncontrolled The comparison results indicate that by the way of the semiactive control method presented， the top lap′s vibration can be inhibited efficiently
Key words： double sided polishing machine; top lap; vibration inhibition; magneto rheological damper; semiactive control