Research on lapping process in mass production for precision Si3N4 ceramic ball

LIN Ming-xing1， LV Bing-hai1， YUAN Ju-long1， DENG Qian-fa1， MENG Ling-feng2
（1. Key Laboratory of E&M / Ministry of Education & Zhejiang Province， Zhejiang University of Technology，Hangzhou 310014，China；  2. Jiangsu WiStates Precision Technology Co.， Ltd.， Changzhou 213164， China）

Abstract： In order to solve the problems of the lapping process for the precision Si3N4 ball in mass production，the ultra-precision lapping technology in the lapping process for Si3N4 ball was investigated. The lapping process was analyzed. The relationship between the sphericity，surface quality，material removal rate and the different abrasives in different lapping stages was established. A method was presented to comparative analysis. The surface quality was evaluated on the Si3N4 ball. The sphericity，surface roughness and vibration value of the finished Si3N4 balls were tested. The experimental results indicate that sphericity，surface roughness and vibration value are lower than 0.062 μm，1.48 nm and 24 dB respectively. The Si3N4 balls at the G3 level in mass production are obtained.
Key words： silicon nitride（Si3N4）；ceramic ball； surface roughness； sphericity； lapping process