Reasearch of abrasive microflow for acoustic suspension polishing

LIN Yun， WANG Zheng-wei， WEN Dong-hui， OU Chang-jing
（College of Mechanical Engineering， Zhejiang University of Technology， Hangzhou 310014， China）

Abstract： Aiming at solving the problem of the sample preparation of high quality，a new way of polishing named acoustic suspension polishing considering the stable sound pressure provided by the acoustic suspension was investigated. The sound pressure inside the polishing equipment was simulated by the PDE toolbox of the software Matlab. The effects of the sound pressure field in the polishing tank were compared by different reflector ends. The shape and the dimension of the ultrasonic reflector are suitable for polishing， the distance between the ultrasonic emission end and the ultrasonic reflector were optimized. With the help of the PIV，the correlation between the abrasive flow and the sound pressure field was analyzed. The results indicate that the direction abrasive moves are approximately the same as the equipotential line，while the biggest velocity of the abrasive is proportional to the sound pressure.
Key words： acoustic suspension； suspension polishing； abrasive flow； PIV；micro-flow