Design of dynamic performance detector system for linear grating sensor

WANG Min， WANG Xiao-yi
（College of Mechanical Engineering & Applied Electronics Technology，
Beijing University of Technology， Beijing 100124， China）

Abstract： Aiming at the problem of lacking the necessary means for linear grating dynamic characteristics test，currently，comparison measurement principle was adopted，laser interferometer was used as measurement reference，a linear grating dynamic characteristics detection and reliability test program was proposed，the influence of speed and acceleration to linear grating measurement accuracy was studied through experimental method. Based on precision aerostatic guideway，laser interferometer and CNC technology，a linear grating dynamic characteristics test system was developed. The test bench adopted horizontal structure，mainly composed of mechanical system，servo system，data acquisition and processing system，and software system，with precision testing，dynamic performance testing and life testing function. The results of accuracy analysis indicate that， the uncertainty of the test system is 0.124 μm，and that meets the accuracy requirements for detecting linear grating with accuracy of 0.5 μm.
Key words： grating sensor； dynamic performance； detector system； aerostatic guideway