Research of RF superimposed DC bias in field of vacuum coating

CHEN Shu-jun1， WANG Hai-liang1， LIU Song1， LI Zhen-dong2， WANG Jian-xin1， XV Jing-jing1
（1. College of Mechanical Engineering & Applied Electronics Technology， Beijing University of Technology，
Beijing 100124， China；  2. Chinese Academy of Agricultural Mechanization Sciences， Beijing 100083， China）

Abstract： Aiming at the superposition of radio frequency（RF） power and DC bias power for the RF glow discharge process，by analyzing the operating principle of impedance matching network and high frequency shielding network，the impedance matching network can maximize the high frequency energy that transferred to the vacuum chamber，the high frequency shielding network can shield the high frequency energy and make the most of low frequency energy that transferred to the vacuum chamber. The RF power，DC bias power and vacuum chamber were simulated as a system in RF glow discharge process，the superposition of RF power and DC bias power was achieved，the vacuum coating experiment was carried out by self-made RF power and DC bias power system，the feasibility of the dual power system was confirmed. The results indicate that the impedance matching network and the high frequency shielding network make the superposition of RF power and DC bias power well，the high frequency energy with negative bias voltage produced by double power system can affect vacuum coating process and help to explore new coating process.
Key words： radio frequency（RF） power； DC bias； impedance matching； vacuum coating