Influence of reflection ring on temperature field of floatzone furnace
FU Linjian, CAO Jianwei, SHEN Wenjie, ZHU Liang, ZHANG Jun,
SHI Gang, OUYANG Penggen, YE Xin, QIU Minxiu
(Zhejiang Jingsheng M&E Co.,Ltd., Shangyu 312300, China)
Abstract: Aiming at the problem of nonuniform radial resistivity of monocrystalline silicon ,which is caused by the difference of external axial temperature gradient and the internal temperature gradient while the grown monocrystalline silicon has a large diameter. In order to analyze the influence of reflection ring on the temperature field, a numerical simulation of the temperature field of the monocrystalline silicon was made by using the finite element method. The models with reflection ring and without reflection ring were built to analyze the external temperature distribution and longitudinal temperature distribution of the monocrystalline silicon. The results indicate that the reflection ring could improve the temperature distribution and lower monocrystalline silicon′s external temperature gradient, thus leading to a uniform radial temperature gradient and higher radial resistivity, then effectively avoiding cracks on the surface of the grown monocrystalline silicon.
Key words: float zone method; reflection ring; numerical simulation; temperature field