Read-out accuracy analysis and torquer-dirver design of quartz flexible accelerometer

WEN Yi-qing，HE Hui-yong，TANG Li-jun，ZHAO Dan，WANG Yan，SHANG Mei-xue，LIU Wen，ZENG Peng-fei

（School of Physics and Electronic Sciences，Changsha University of Science & Technology，

Changsha 410114，China）

Abstract：Aiming at realizing the all-digital closed-loop system of the quartz flexible accelerometer，the torquer-dirver and read-out accuracy of the accelerometer，after the analysis of the structure and working principle of the torquer and relations between torquer-dirver and read-out accuracy，were studied. The digital pulse-width modulation（PWM）circuit has been designed，which was used to drive the torquer of the accelerometer and its duty parameters was worked as the export of the accelerometer. By the means of PWM，the all-digital

closed-loop system was simulated and experimented. The experimental and the simulation results show that the standard deviation of the system can reach at about 1.5×10-5 g，and the system accuracy can reach at about 10-4 g by adjusting the external resistor of the torquer，frequency and logic digits of the PWM within the specific limits. And this scheme simplify the circuit and reduces the interference.