Development of dedicated high voltage power supply apply to dielectrophoresis polishing

ZHAO Tianchen1, DENG Qianfa1, YUAN Julong1, ZHU Yonghua2

(1.Ultraprecision Machining Centre, Zhejiang University of Technology, Hangzhou, 310014, China;
2.College of Electrical and Information Engineering, Quzhou University, Quzhou, 324000, China)

Abstract: Aiming at the problem of high performance requirements of the power supply on dielectrophoresis polishing, the signal generating circuit, signal amplification circuit, DCDC booster circuit, optical coupling and inverter circuit were studied and summarized, a set of suitable for dielectrophoresis polishing dedicated high voltage power supply was developed. The working principle of high voltage power supply: DCDC (direct current) boost circuit provides high voltage to IGBT (Insulated Gate Bipolar Transistor) inverter bridge circuit. SCM (Single Chip Micyoco) through IGBT optocoupler drive to control the switch state of IGBT module. Eventually voltage at load resistor in inverter circuit was sent to the electrodes in upper and lower plates in polishing machine which is in parallel with load resistor. The high voltage power supply was tested by using the contrast experiment of the dielectrophoresis polishing and the traditional polishing. The results indicate that all the indexes of high voltage power supply meet the design requirements and dielectrophoresis polishing material removal rate increased by 15.5%, which verified the feasibility and engineering application value of this high voltage power supply.

Key words: dielectrophoresis; high voltage; adjustable; insulated gate bipolar transistor (IGBT)