Simulation of micro-mechanical capacitive microphone

DONG Jian, LONG Zhijian, SUN Li, JIN Yanli

(Zhejiang Provincial Key Laboratory of Special Purpose Equipment and Advanced Manufacturing Technology,
Zhejiang University of Tecnology, Hangzhou 310014, China)

Abstract: In order to solve the problem of the high cost of the development of the micromechanical capacitive microphone ,we designed the mask of microphone by Blueprint module inIntellisuiteTM, we simulated the process flow of microphone by IntelliFab module in IntelliSuiteTM in this paper. At the end of simulation, the module of microphone could be geted ,then the 3D BUILDER，TEM module in IntelliSuiteTM were used to get sensitivity, pullin voltage and frequency response of microphone. The relevant parameters of micro mechanical capacitive microphone according to the simulation process could provide a reference and guide the products development and design process of the microphone. The results indicate that the process can replace the actual development of the manufacturing process and aimed at saving the cost of product development.

Key words: capacitive microphone; sensitivity; pullin voltage; nature frequency; sense film