Impact failure simulation analysis and experimentof MEMS acceleration switches
                                                         DING Limei, LI Shizhong, DUAN Rongjie, YANG Le
                                    (College of Mechatronic Engineering, North University of China, Taiyuan 030051, China)

Abstract: Aiming at the problem of poor reliability of MEMS devices, regarding MEMS acceleration switch as the research object, ANSYS finite element analysis of ware was used,and the main part of the MEMS acceleration switch was the structure of the “block torsion beamcantilever beamquality”.The finite element model of the switch was established,and the finite element analysis of the drop impact in the three directions of the MEMS acceleration switch was carried out.Through simulation calculation and analysis,the maximum magnitude of the device under the impact load was obtained,and the failure mode of acceleration switch was analyzed.The impact test was verified by the Marshall hammer test platform, the limit magnitude of the acceleration switch impact failure was obtained,and the main failure mode of the MEMS acceleration switch was fracture failure.The results indicate that the simulation analysis results of the main failure modes of the MEMS acceleration switch are reliable and consistent with the test results.

Key words: microelectromechanical system(MEMS); acceleration switch; impact load; failure simulation; hammer test