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Experimental study on influence of structural parameters on performance of controllable static pressure dry gas seal
Published:2023-11-01 author:YAN Xinxin, ZHENG Rao, LI Shuangxi, et al. Browse: 986 Check PDF documents
Experimental study on influence of structural parameters on performance 
of controllable static pressure dry gas seal


YAN Xinxin1, ZHENG Rao1, LI Shuangxi1, JIA Yuning2, CHEN Yang3, LI Mengzhu3, ZHANG Jingbo4


(1.School of Mechanical and Electrical Engineering, Beijing University of Chemical Technology, Beijing 100029, China; 2.Shanghai 

Tianma Microelectronics Co., Ltd., Shanghai 201201, China; 3.System Engineering Research Institute, China Shipbuilding 
Corporation, 
Beijing 100094, China; 4.Beijing North Huachuang Microelectronics Equipment Co., Ltd., Beijing 100176,China)


Abstract: Controllable hydrostatic seal has the characteristics of low leakage, high opening force and high gas film stiffness. However, due to the changing working conditions during operation, the controllable hydrostatic seal also has the problem of leakage failure. Aiming at the leakage problem of controllable hydrostatic seal under constant rotating speed and pressure of sealed medium, the gas film flow field model of controllable hydrostatic seal was established, and the performance of controllable hydrostatic seal under different structural parameters was studied, the influence mechanism of structural parameters on controllable hydrostatic seal was revealed. Firstly, according to the principle of controllable hydrostatic seal, the leakage, thefilm thickness and thefilm stiffness were determined as thesealing performance parameters. Then, the finite element method was used to establish the controllable hydrostatic seal analysis model, determine the working condition parameters of the study, and design the numerical simulation analysis and calculation research route, and calculate the change trend and law of the sealing performance of the controllable hydrostatic seal with the throttle hole, thepressure groove, and the end face width parameters. Finally,a set of controllable hydrostatic seal test device was designed independently, and the operation test of the device was carried out. By measuring the total leakage of controllable hydrostatic seal, the accuracy of numerical simulation results was verified, and the influence law of different structural parameters on the leakage of controllable hydrostatic seal was obtained. The results show that the number of throttling holes is 8~12, the diameter is between 0.15mm~0.25mm, the position of the pressure groove is about 0.5mm away from the inner side of the controllable hydrostatic seal, and the end face width is controlled within the range of 23mm~27mm. The controllable hydrostatic seal has the optimal sealing performance.

Key words: non-contact seal; controllable hydrostatic seal; leakage failure; sealing performance parameters; numerical simulation; throttle hole; pressure groove; end face width parameters
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