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Real-time compensation method for angle measurement error of circular grating
Published:2023-11-01 author:SUN Xiuzhao, LEI Xianqing, WANG Xiaoyi. Browse: 1147 Check PDF documents
Real-time compensation method for angle measurement error of circular grating


SUN Xiuzhao, LEI Xianqing, WANG Xiaoyi

(Henan Key Laboratory of Mechanical Design and Transmission System, Henan University of Science and 
Technology, Luoyang 471003, China)


Abstract: Error compensation is a common means to improve the angle measurement accuracy of circular grating. Some machine tools and precision instruments can't compensate the error of circular grating online because they don't have the error compensation function of position measuring elements. Aiming at the problem, a relaying real-time compensation method for angle measurement error of circular grating was proposed. Firstly, the compensation principle of angle measurement error of circular grating was analyzed, harmonic fitting function and compensation model for angle measurement error of circular grating was established . Then, the hardware selection of the error compensation module was carried out, and signal conversion circuit with a differential chip as the core was designed, included a circuit for a differential signal to a single ended signal and a circuit for a single ended signal to a differential signal. The embedded software of the error compensation module was developed. The designed error compensation module was inserted into the signal output channel of the circular grating. An experimental system based on relaying error compensation module was established. Finally, the original error data of the circular grating was collected by the Renishaw calibration device, the angle measurement error data was fitted by the harmonic function, applied error compensation model, and the online compensation test of the angle measurement error of the circular grating was carried out by the hardware module of error compensation. The results indicate that after compensating the circular grating with the maximum angle measurement error of 134.59″, the maximum error decreased to 12.62″.It can be seen that the real-time error compensation method can significantly improve the angle measurement accuracy of circular grating.

Key words: servo controller; angular position feedback device; precision instruments; angle measurement accuracy of circular grating; error compensation model; hardware compensation; harmonic function
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